Veils-Free DRY (ICP) Etching of Gold Films with a Vertical Sharp Sidewall

Keskin S., Aydemir A., Akın T.

The 23rd Micromechanics and Micro Systems Europe Workshop, (MME’12), Erfurt, Germany, 9 - 12 September 2012, pp.1-5

  • Publication Type: Conference Paper / Full Text
  • City: Erfurt
  • Country: Germany
  • Page Numbers: pp.1-5
  • Middle East Technical University Affiliated: Yes