S. Keskin Et Al. , "Veils-Free DRY (ICP) Etching of Gold Films with a Vertical Sharp Sidewall," The 23rd Micromechanics and Micro Systems Europe Workshop, (MME’12) , Erfurt, Germany, pp.1-5, 2012
Keskin, S. Et Al. 2012. Veils-Free DRY (ICP) Etching of Gold Films with a Vertical Sharp Sidewall. The 23rd Micromechanics and Micro Systems Europe Workshop, (MME’12) , (Erfurt, Germany), 1-5.
Keskin, S., Aydemir, A., & Akın, T., (2012). Veils-Free DRY (ICP) Etching of Gold Films with a Vertical Sharp Sidewall . The 23rd Micromechanics and Micro Systems Europe Workshop, (MME’12) (pp.1-5). Erfurt, Germany
Keskin, Selçuk, TAYFUN AKIN, And TAYFUN AKIN. "Veils-Free DRY (ICP) Etching of Gold Films with a Vertical Sharp Sidewall," The 23rd Micromechanics and Micro Systems Europe Workshop, (MME’12), Erfurt, Germany, 2012
Keskin, Selçuk Et Al. "Veils-Free DRY (ICP) Etching of Gold Films with a Vertical Sharp Sidewall." The 23rd Micromechanics and Micro Systems Europe Workshop, (MME’12) , Erfurt, Germany, pp.1-5, 2012
Keskin, S. Aydemir, A. And Akın, T. (2012) . "Veils-Free DRY (ICP) Etching of Gold Films with a Vertical Sharp Sidewall." The 23rd Micromechanics and Micro Systems Europe Workshop, (MME’12) , Erfurt, Germany, pp.1-5.
@conferencepaper{conferencepaper, author={Selçuk Keskin Et Al. }, title={Veils-Free DRY (ICP) Etching of Gold Films with a Vertical Sharp Sidewall}, congress name={The 23rd Micromechanics and Micro Systems Europe Workshop, (MME’12)}, city={Erfurt}, country={Germany}, year={2012}, pages={1-5} }