Copy For Citation
Mert Torunbalci M., Alper S. E., Akın T.
1st IEEE International Symposium on Inertial Sensors and Systems, ISISS 2014, Laguna Beach, CA, United States Of America, 25 - 26 February 2014
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Publication Type:
Conference Paper / Full Text
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Doi Number:
10.1109/isiss.2014.6782539
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City:
Laguna Beach, CA
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Country:
United States Of America
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Keywords:
Wafer level hermetic packaging, vertical feedthroughs, Au-Si eutectic bonding, MEMS inertial sensors
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Middle East Technical University Affiliated:
Yes