M. Mert Torunbalci Et Al. , "Wafer level hermetic encapsulation of MEMS inertial sensors using SOI cap wafers with vertical feedthroughs," 1st IEEE International Symposium on Inertial Sensors and Systems, ISISS 2014 , Laguna Beach, CA, United States Of America, 2014
Mert Torunbalci, M. Et Al. 2014. Wafer level hermetic encapsulation of MEMS inertial sensors using SOI cap wafers with vertical feedthroughs. 1st IEEE International Symposium on Inertial Sensors and Systems, ISISS 2014 , (Laguna Beach, CA, United States Of America).
Mert Torunbalci, M., Alper, S. E., & Akın, T., (2014). Wafer level hermetic encapsulation of MEMS inertial sensors using SOI cap wafers with vertical feedthroughs . 1st IEEE International Symposium on Inertial Sensors and Systems, ISISS 2014, Laguna Beach, CA, United States Of America
Mert Torunbalci, Mustafa, Said Emre Alper, And TAYFUN AKIN. "Wafer level hermetic encapsulation of MEMS inertial sensors using SOI cap wafers with vertical feedthroughs," 1st IEEE International Symposium on Inertial Sensors and Systems, ISISS 2014, Laguna Beach, CA, United States Of America, 2014
Mert Torunbalci, Mustafa M. Et Al. "Wafer level hermetic encapsulation of MEMS inertial sensors using SOI cap wafers with vertical feedthroughs." 1st IEEE International Symposium on Inertial Sensors and Systems, ISISS 2014 , Laguna Beach, CA, United States Of America, 2014
Mert Torunbalci, M. Alper, S. E. And Akın, T. (2014) . "Wafer level hermetic encapsulation of MEMS inertial sensors using SOI cap wafers with vertical feedthroughs." 1st IEEE International Symposium on Inertial Sensors and Systems, ISISS 2014 , Laguna Beach, CA, United States Of America.
@conferencepaper{conferencepaper, author={Mustafa Mert Torunbalci Et Al. }, title={Wafer level hermetic encapsulation of MEMS inertial sensors using SOI cap wafers with vertical feedthroughs}, congress name={1st IEEE International Symposium on Inertial Sensors and Systems, ISISS 2014}, city={Laguna Beach, CA}, country={United States Of America}, year={2014}}