Laser-slicing of silicon with 3D nonlinear laser lithography

TOKEL O., Turnali A., Colakoglu T., Ilday S., Borra M. Z. , Pavlov I., ...More

Conference on Lasers and Electro-Optics Europe / European Quantum Electronics Conference (CLEO/Europe-EQEC), Munich, Germany, 25 - 29 June 2017 identifier

  • Publication Type: Conference Paper / Full Text
  • City: Munich
  • Country: Germany
  • Middle East Technical University Affiliated: Yes


Recently, we have showed a direct laser writing method that exploits nonlinear interactions to form subsurface modifications in silicon. Here, we use the technique to demonstrate laser-slicing of silicon and its applications.