Laser-slicing of silicon with 3D nonlinear laser lithography

TOKEL O., Turnali A., Colakoglu T., Ilday S., Borra M. Z., Pavlov I., ...Daha Fazla

Conference on Lasers and Electro-Optics Europe / European Quantum Electronics Conference (CLEO/Europe-EQEC), Munich, Almanya, 25 - 29 Haziran 2017 identifier

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Basıldığı Şehir: Munich
  • Basıldığı Ülke: Almanya
  • Orta Doğu Teknik Üniversitesi Adresli: Evet

Özet

Recently, we have showed a direct laser writing method that exploits nonlinear interactions to form subsurface modifications in silicon. Here, we use the technique to demonstrate laser-slicing of silicon and its applications.