TOKEL, O. Et Al. 2017. Laser-slicing of silicon with 3D nonlinear laser lithography. Conference on Lasers and Electro-Optics Europe / European Quantum Electronics Conference (CLEO/Europe-EQEC) , (Munich, Germany).

TOKEL, O., Turnali, A., Colakoglu, T., Ilday, S., Borra, M. Z., Pavlov, I., ... BEK, A.(2017). Laser-slicing of silicon with 3D nonlinear laser lithography . Conference on Lasers and Electro-Optics Europe / European Quantum Electronics Conference (CLEO/Europe-EQEC), Munich, Germany

TOKEL, ONUR Et Al. "Laser-slicing of silicon with 3D nonlinear laser lithography," Conference on Lasers and Electro-Optics Europe / European Quantum Electronics Conference (CLEO/Europe-EQEC), Munich, Germany, 2017

TOKEL, ONUR Et Al. "Laser-slicing of silicon with 3D nonlinear laser lithography." Conference on Lasers and Electro-Optics Europe / European Quantum Electronics Conference (CLEO/Europe-EQEC) , Munich, Germany, 2017

TOKEL, O. Et Al. (2017) . "Laser-slicing of silicon with 3D nonlinear laser lithography." Conference on Lasers and Electro-Optics Europe / European Quantum Electronics Conference (CLEO/Europe-EQEC) , Munich, Germany.

@conferencepaper{conferencepaper, author={ONUR TOKEL Et Al. }, title={Laser-slicing of silicon with 3D nonlinear laser lithography}, congress name={Conference on Lasers and Electro-Optics Europe / European Quantum Electronics Conference (CLEO/Europe-EQEC)}, city={Munich}, country={Germany}, year={2017}}