A method and electrical model for the anodic bonding of SOI and glass wafers


Tatar E., Torunbalci M., Alper S., AKIN T.

2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, Fransa, 29 Ocak - 02 Şubat 2012, ss.68-71 identifier identifier