Tatar, E. Et Al. 2012. A method and electrical model for the anodic bonding of SOI and glass wafers. 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 , (Paris, France), 68-71.

Tatar, E., Torunbalci, M., Alper, S., & AKIN, T., (2012). A method and electrical model for the anodic bonding of SOI and glass wafers . 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 (pp.68-71). Paris, France

Tatar, E. Et Al. "A method and electrical model for the anodic bonding of SOI and glass wafers," 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 2012

Tatar, E. Et Al. "A method and electrical model for the anodic bonding of SOI and glass wafers." 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 , Paris, France, pp.68-71, 2012

Tatar, E. Et Al. (2012) . "A method and electrical model for the anodic bonding of SOI and glass wafers." 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 , Paris, France, pp.68-71.

@conferencepaper{conferencepaper, author={E. Tatar Et Al. }, title={A method and electrical model for the anodic bonding of SOI and glass wafers}, congress name={2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012}, city={Paris}, country={France}, year={2012}, pages={68-71} }