A simple out of plane capacitive MEMS accelerometer utilizing lateral and vertical electrodes for differential sensing


Terzioglu Y., Kose T., Azgın K. , Akın T.

2015 IEEE SENSORS, Busan, South Korea, 1 - 04 November 2015, pp.1-3 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/icsens.2015.7370306
  • City: Busan
  • Country: South Korea
  • Page Numbers: pp.1-3
  • Keywords: differential, readout, closed loop, z axis, capacitive, accelerometer, comb fingers, hybrid