Y. Terzioglu Et Al. , "A simple out of plane capacitive MEMS accelerometer utilizing lateral and vertical electrodes for differential sensing," 2015 IEEE SENSORS , Busan, South Korea, pp.1-3, 2015
Terzioglu, Y. Et Al. 2015. A simple out of plane capacitive MEMS accelerometer utilizing lateral and vertical electrodes for differential sensing. 2015 IEEE SENSORS , (Busan, South Korea), 1-3.
Terzioglu, Y., Kose, T., Azgın, K., & Akın, T., (2015). A simple out of plane capacitive MEMS accelerometer utilizing lateral and vertical electrodes for differential sensing . 2015 IEEE SENSORS (pp.1-3). Busan, South Korea
Terzioglu, Yunus Et Al. "A simple out of plane capacitive MEMS accelerometer utilizing lateral and vertical electrodes for differential sensing," 2015 IEEE SENSORS, Busan, South Korea, 2015
Terzioglu, Yunus Et Al. "A simple out of plane capacitive MEMS accelerometer utilizing lateral and vertical electrodes for differential sensing." 2015 IEEE SENSORS , Busan, South Korea, pp.1-3, 2015
Terzioglu, Y. Et Al. (2015) . "A simple out of plane capacitive MEMS accelerometer utilizing lateral and vertical electrodes for differential sensing." 2015 IEEE SENSORS , Busan, South Korea, pp.1-3.
@conferencepaper{conferencepaper, author={Yunus Terzioglu Et Al. }, title={A simple out of plane capacitive MEMS accelerometer utilizing lateral and vertical electrodes for differential sensing}, congress name={2015 IEEE SENSORS}, city={Busan}, country={South Korea}, year={2015}, pages={1-3} }