A folded leg Ka-band RF MEMS shunt switch with amorphous silicon (a-Si) sacrificial layer


Demirel K., Yazgan E., Demir Ş. , Akın T.

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, cilt.23, ss.1191-1200, 2017 (SCI İndekslerine Giren Dergi) identifier identifier

  • Cilt numarası: 23
  • Basım Tarihi: 2017
  • Doi Numarası: 10.1007/s00542-016-2892-5
  • Dergi Adı: MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
  • Sayfa Sayıları: ss.1191-1200

Özet

Design and fabrication of a folded leg Ka-band RF micro electro mechanical systems (RF MEMS) is presented. The mechanical design is carried out to observe minimum permanent deformation on the MEMS bridge after our in-house MEMS packaging process temperature treatment (200 A degrees C). On the other hand, the actuation voltage is aimed as < 30 V and measured as 24-25 V before thermal treatment. Moreover, the switch shows 28-29 V actuation voltage after thermal treatment. The fabricated switch shows -0.4 dB insertion loss for the up state position at Ka-band, before and after heat treatment. The switch is fabricated on quartz wafer using an in-house surface micromachining process with a new amorphous silicon sacrificial layer structure.