Citation Formats
A folded leg Ka-band RF MEMS shunt switch with amorphous silicon (a-Si) sacrificial layer
  • IEEE
  • ACM
  • APA
  • Chicago
  • MLA
  • Harvard
  • BibTeX

K. Demirel Et Al. , "A folded leg Ka-band RF MEMS shunt switch with amorphous silicon (a-Si) sacrificial layer," MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS , vol.23, pp.1191-1200, 2017

Demirel, K. Et Al. 2017. A folded leg Ka-band RF MEMS shunt switch with amorphous silicon (a-Si) sacrificial layer. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS , vol.23 , 1191-1200.

Demirel, K., Yazgan, E., Demir, Ş., & Akın, T., (2017). A folded leg Ka-band RF MEMS shunt switch with amorphous silicon (a-Si) sacrificial layer. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS , vol.23, 1191-1200.

Demirel, Kaan Et Al. "A folded leg Ka-band RF MEMS shunt switch with amorphous silicon (a-Si) sacrificial layer," MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS , vol.23, 1191-1200, 2017

Demirel, Kaan Et Al. "A folded leg Ka-band RF MEMS shunt switch with amorphous silicon (a-Si) sacrificial layer." MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS , vol.23, pp.1191-1200, 2017

Demirel, K. Et Al. (2017) . "A folded leg Ka-band RF MEMS shunt switch with amorphous silicon (a-Si) sacrificial layer." MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS , vol.23, pp.1191-1200.

@article{article, author={Kaan Demirel Et Al. }, title={A folded leg Ka-band RF MEMS shunt switch with amorphous silicon (a-Si) sacrificial layer}, journal={MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS}, year=2017, pages={1191-1200} }