A hybrid silicon-on-glass (SOG) lateral micro-accelerometer with CMOS readout circuitry

Chae J., Kulah H., Najafi K.

15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002, Las Vegas, NV, United States Of America, 20 - 24 January 2002, pp.623-626, (Full Text)

  • Publication Type: Conference Paper / Full Text
  • Volume:
  • City: Las Vegas, NV
  • Country: United States Of America
  • Page Numbers: pp.623-626
  • Middle East Technical University Affiliated: No