J. Chae Et Al. , "A hybrid silicon-on-glass (SOG) lateral micro-accelerometer with CMOS readout circuitry," 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 , Las Vegas, NV, United States Of America, pp.623-626, 2002
Chae, J. Et Al. 2002. A hybrid silicon-on-glass (SOG) lateral micro-accelerometer with CMOS readout circuitry. 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 , (Las Vegas, NV, United States Of America), 623-626.
Chae, J., Kulah, H., & Najafi, K., (2002). A hybrid silicon-on-glass (SOG) lateral micro-accelerometer with CMOS readout circuitry . 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 (pp.623-626). Las Vegas, NV, United States Of America
Chae, Junseok, HALUK KÜLAH, And Khalil Najafi. "A hybrid silicon-on-glass (SOG) lateral micro-accelerometer with CMOS readout circuitry," 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002, Las Vegas, NV, United States Of America, 2002
Chae, Junseok Et Al. "A hybrid silicon-on-glass (SOG) lateral micro-accelerometer with CMOS readout circuitry." 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 , Las Vegas, NV, United States Of America, pp.623-626, 2002
Chae, J. Kulah, H. And Najafi, K. (2002) . "A hybrid silicon-on-glass (SOG) lateral micro-accelerometer with CMOS readout circuitry." 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 , Las Vegas, NV, United States Of America, pp.623-626.
@conferencepaper{conferencepaper, author={Junseok Chae Et Al. }, title={A hybrid silicon-on-glass (SOG) lateral micro-accelerometer with CMOS readout circuitry}, congress name={15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002}, city={Las Vegas, NV}, country={United States Of America}, year={2002}, pages={623-626} }