Implantation and sputtering of ge and si ions into SiO2 substrates using electric fields for acceleration and optimisation of laser-produced Ion streams used for modification of semiconductor materials


Rosinski M., Wolowski J., YERCİ S. , Parys P., TURAN R. , Badziak J., ...More

Synthesis and Surface Engineering of Three-Dimensional Nanostructures, Boston, MA, United States Of America, 26 - 30 November 2007, vol.1054, pp.38-43 identifier

  • Publication Type: Conference Paper / Full Text
  • Volume: 1054
  • City: Boston, MA
  • Country: United States Of America
  • Page Numbers: pp.38-43