SILICON MICROMACHINING AND MICROFABRICATION TECHNIQUES FOR INTEGRATED SENSOR AND ACTUATOR SYSTEMS

AKIN T.

7th Mediterranean Electrotechnical Conference (MeleCON 94), Antalya, Turkey, 12 - 14 April 1994, pp.529-532 identifier

  • Publication Type: Conference Paper / Full Text
  • City: Antalya
  • Country: Turkey
  • Page Numbers: pp.529-532