AKIN, T. 1994. SILICON MICROMACHINING AND MICROFABRICATION TECHNIQUES FOR INTEGRATED SENSOR AND ACTUATOR SYSTEMS. 7th Mediterranean Electrotechnical Conference (MeleCON 94) , (Antalya, Turkey), 529-532.

AKIN, T., (1994). SILICON MICROMACHINING AND MICROFABRICATION TECHNIQUES FOR INTEGRATED SENSOR AND ACTUATOR SYSTEMS . 7th Mediterranean Electrotechnical Conference (MeleCON 94) (pp.529-532). Antalya, Turkey

AKIN, TAYFUN. "SILICON MICROMACHINING AND MICROFABRICATION TECHNIQUES FOR INTEGRATED SENSOR AND ACTUATOR SYSTEMS," 7th Mediterranean Electrotechnical Conference (MeleCON 94), Antalya, Turkey, 1994

AKIN, TAYFUN. "SILICON MICROMACHINING AND MICROFABRICATION TECHNIQUES FOR INTEGRATED SENSOR AND ACTUATOR SYSTEMS." 7th Mediterranean Electrotechnical Conference (MeleCON 94) , Antalya, Turkey, pp.529-532, 1994

AKIN, T. (1994) . "SILICON MICROMACHINING AND MICROFABRICATION TECHNIQUES FOR INTEGRATED SENSOR AND ACTUATOR SYSTEMS." 7th Mediterranean Electrotechnical Conference (MeleCON 94) , Antalya, Turkey, pp.529-532.

@conferencepaper{conferencepaper, author={TAYFUN AKIN}, title={SILICON MICROMACHINING AND MICROFABRICATION TECHNIQUES FOR INTEGRATED SENSOR AND ACTUATOR SYSTEMS}, congress name={7th Mediterranean Electrotechnical Conference (MeleCON 94)}, city={Antalya}, country={Turkey}, year={1994}, pages={529-532} }