A monolithic three axis silicon capacitive accelerometer with micro g resolution

Junseok C., Najefi K., KÜLAH H.

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), Boston, MA, USA, United States Of America, 8 - 12 June 2003, pp.81-84

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/sensor.2003.1215258
  • City: Boston, MA, USA
  • Country: United States Of America
  • Page Numbers: pp.81-84
  • Middle East Technical University Affiliated: No