Junseok, C. Et Al. 2003. A monolithic three axis silicon capacitive accelerometer with micro g resolution. TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) , (Boston, MA, USA, United States Of America), 81-84.

Junseok, C., Najefi, K., & KÜLAH, H., (2003). A monolithic three axis silicon capacitive accelerometer with micro g resolution . TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) (pp.81-84). Boston, MA, USA, United States Of America

Junseok, Chae, Khalil Najefi, And HALUK KÜLAH. "A monolithic three axis silicon capacitive accelerometer with micro g resolution," TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), Boston, MA, USA, United States Of America, 2003

Junseok, Chae Et Al. "A monolithic three axis silicon capacitive accelerometer with micro g resolution." TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) , Boston, MA, USA, United States Of America, pp.81-84, 2003

Junseok, C. Najefi, K. And KÜLAH, H. (2003) . "A monolithic three axis silicon capacitive accelerometer with micro g resolution." TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) , Boston, MA, USA, United States Of America, pp.81-84.

@conferencepaper{conferencepaper, author={Chae Junseok Et Al. }, title={A monolithic three axis silicon capacitive accelerometer with micro g resolution}, congress name={TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)}, city={Boston, MA, USA}, country={United States Of America}, year={2003}, pages={81-84} }