A new MEMS approach for spirometers

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Tezin Türü: Yüksek Lisans

Tezin Yürütüldüğü Kurum: Orta Doğu Teknik Üniversitesi, Mühendislik Fakültesi, Elektrik ve Elektronik Mühendisliği Bölümü, Türkiye

Tezin Onay Tarihi: 2016

Öğrenci: SAHAR HABIBIABAD

Danışman: YEŞİM SERİNAĞAOĞLU DOĞRUSÖZ

Özet:

Measurement of breathing parameters is necessary for a variety of applications ranging from respiration monitoring to breathing-related diseases. In this respect, spirometry is one of the most common techniques used for Asthma and Chronic Obstructive Pulmonary Disease (COPD) patients to detect the type and extent of the lung malfunctions by monitoring the exhaled or inhaled air. The efforts in this work have been focused on the miniaturization of turbine-based spirometers using MEMS (Micro-electromechanical Systems) technology for accurate spirometry analysis, improved portability, integration with portable electronics, and lower device cost. Accordingly, this thesis presents the design, simulation, and fabrication of the first turbine-based MEMS spirometer. This work will also enable seamless integration of the MEMS spirometer with cell phones for patient self-monitoring, as opposed to previous ndemonstrations of larger spirometer modules.