A wireless batch sealed absolute capacitive pressure sensor

Akar O., Akın T. , Najafi K.

Sensors and Actuators, A: Physical, vol.95, pp.29-38, 2001 (Journal Indexed in SCI) identifier identifier

  • Publication Type: Article / Article
  • Volume: 95
  • Publication Date: 2001
  • Doi Number: 10.1016/s0924-4247(01)00753-1
  • Title of Journal : Sensors and Actuators, A: Physical
  • Page Numbers: pp.29-38
  • Keywords: wireless sensor, sealed pressure sensor, capacitive pressure sensor, DESIGN