A MEMS turbine prototype for respiration harvesting

Goreke U., Habibiabad S., AZGIN K., Beyaz M. I.

15th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS), Massachusetts, United States Of America, 1 - 04 December 2015, vol.660 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Volume: 660
  • Doi Number: 10.1088/1742-6596/660/1/012059
  • City: Massachusetts
  • Country: United States Of America
  • Middle East Technical University Affiliated: Yes


The design, manufacturing, and performance characterization of a MEMS-scale turbine prototype is reported. The turbine is designed for integration into a respiration harvester that can convert normal human breathing into electrical power through electromagnetic induction. The device measures 10 mm in radius, and employs 12 blades located around the turbine periphery along with ball bearings around the center. Finite element simulations showed that an average torque of 3.07 mu Nm is induced at 12 lpm airflow rate, which lies in normal breathing levels. The turbine and a test package were manufactured using CNC milling on PMMA. Tests were performed at respiration flow rates between 5-25 lpm. The highest rotational speed was measured to be 9.84 krpm at 25 lpm, resulting in 8.96 mbar pressure drop across the device and 370 mW actuation power.