Simplified process flow for the fabrication of PERC solar cells with ion implanted emitter

Bektas G., Kokbudak G., Kececi A. E., Butuner S. K., Asav H., Ciftpinar E. H., ...More

Renewable Energy, vol.179, pp.2295-2299, 2021 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 179
  • Publication Date: 2021
  • Doi Number: 10.1016/j.renene.2021.08.054
  • Journal Name: Renewable Energy
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus, Academic Search Premier, PASCAL, Aerospace Database, Aquatic Science & Fisheries Abstracts (ASFA), CAB Abstracts, Communication Abstracts, Compendex, Environment Index, Geobase, Greenfile, Index Islamicus, INSPEC, Pollution Abstracts, Public Affairs Index, Veterinary Science Database, DIALNET, Civil Engineering Abstracts
  • Page Numbers: pp.2295-2299
  • Keywords: Ion implantation, Phosphorus emitter, PERC solar cell, Al2O3/SiNx rear passivation stack, Firing temperature, Simplified process flow, INDUCED DEGRADATION, PASSIVATION
  • Middle East Technical University Affiliated: Yes

Abstract

© 2021 Elsevier LtdIon implanted PERC cells have already achieved power conversion efficiencies of about 20.0%. The process flows reported in the literature for the ion implanted PERC cells with commonly utilized Al2O3/SiNx rear passivation stack, which has the benefit of being less sensitive to surface roughness than SiO2/SiNx stack passivation, notably suffer from the additional process steps such as single side polishing and single side protection. Here, we present a simplified process flow for the fabrication of ion implanted PERC cells having Al2O3/SiNx stack passivation at the textured rear surface without any rear side processing, leading to a power conversion efficiency of 20% at large area. In this context, we show the sensitivity of solar cell efficiency to firing peak temperature, implantation dose, and Al2O3 thickness. The results of the present research will provide a basis for high efficiency implanted PERC cells with significantly reduced workload and cost.