Simplified process flow for the fabrication of PERC solar cells with ion implanted emitter

Bektas G., Kokbudak G., Kececi A. E. , Butuner S. K. , Asav H., Ciftpinar E. H. , ...More

Renewable Energy, vol.179, pp.2295-2299, 2021 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 179
  • Publication Date: 2021
  • Doi Number: 10.1016/j.renene.2021.08.054
  • Journal Name: Renewable Energy
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus, Academic Search Premier, PASCAL, Aerospace Database, Aquatic Science & Fisheries Abstracts (ASFA), CAB Abstracts, Communication Abstracts, Compendex, Environment Index, Geobase, Greenfile, Index Islamicus, INSPEC, Pollution Abstracts, Public Affairs Index, Veterinary Science Database, DIALNET, Civil Engineering Abstracts
  • Page Numbers: pp.2295-2299
  • Keywords: Ion implantation, Phosphorus emitter, PERC solar cell, Al2O3/SiNx rear passivation stack, Firing temperature, Simplified process flow, INDUCED DEGRADATION, PASSIVATION
  • Middle East Technical University Affiliated: Yes


© 2021 Elsevier LtdIon implanted PERC cells have already achieved power conversion efficiencies of about 20.0%. The process flows reported in the literature for the ion implanted PERC cells with commonly utilized Al2O3/SiNx rear passivation stack, which has the benefit of being less sensitive to surface roughness than SiO2/SiNx stack passivation, notably suffer from the additional process steps such as single side polishing and single side protection. Here, we present a simplified process flow for the fabrication of ion implanted PERC cells having Al2O3/SiNx stack passivation at the textured rear surface without any rear side processing, leading to a power conversion efficiency of 20% at large area. In this context, we show the sensitivity of solar cell efficiency to firing peak temperature, implantation dose, and Al2O3 thickness. The results of the present research will provide a basis for high efficiency implanted PERC cells with significantly reduced workload and cost.