A Thermal and Electro-Magnetic Hybrid MOEMS Microscanner With Integrated Spatial Light Modulation and Metalens for Resolution Enhancement of Infrared Imaging Systems

Sozak A., Simsek E., Yelboga T., Gungor A., Balli F., AZGIN K.

IEEE SENSORS JOURNAL, vol.22, no.21, pp.20538-20545, 2022 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 22 Issue: 21
  • Publication Date: 2022
  • Doi Number: 10.1109/jsen.2022.3210043
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus, Aerospace Database, Communication Abstracts, Compendex, INSPEC, Metadex, Civil Engineering Abstracts
  • Page Numbers: pp.20538-20545
  • Keywords: Actuators, Optical sensors, Optical imaging, Optical device fabrication, Force, Detectors, Micromechanical devices, Coded mask, compressive sensing, electromagnetic and thermal actuators, integrated optics, metalens, microoptoelectromechanical system (MOEMS), ACTUATORS
  • Middle East Technical University Affiliated: Yes


This article describes the development of a novel integrated thermal and electromagnetic hybrid microoptoelectro mechanical system (MOEMS)-based scanning actuator. Determining the optical architecture and components used for scanning are significant points of the study. A metalens and a coded mask, both of which can be produced by microfabrication methods, are used in the optical part of the actuator. In this context, a metalens consisting of nanoholes was designed and fabricated as the first alternative. Second, a specific coded mask was designed and applied to the center of the MOEMS structure for obtaining spatial light modulation. Captured scene images including the coded mask are processed and reconstructed by using the compressive sensing image processing algorithms. Silicon-on-insulator (SOI) is the substrate of structure and deep reactive ion and wet etching methods were used to fabricate the integrated actuator. To increase the optical transmission, the optically transmissive coded mask zone was coated with antireflective coating at the midwave infrared band. The magnetic field for obtaining Lorentz force on the actuators was achieved by using the neodymium permanent magnet located beneath the structure.