A miniature and non-resonant vibration-based energy harvester structure

Zorlu O., KÜLAH H.

26th European Conference on Solid-State Transducers (Eurosensors), Krakow, Poland, 9 - 12 September 2012, vol.47, pp.664-667 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Volume: 47
  • Doi Number: 10.1016/j.proeng.2012.09.234
  • City: Krakow
  • Country: Poland
  • Page Numbers: pp.664-667
  • Keywords: Type your keywords here, separated by semicolons
  • Middle East Technical University Affiliated: Yes


This paper presents a miniature and non-resonant vibration based electromagnetic (EM) energy harvester, which generates energy from low frequency and low amplitude vibrations. The structure combines a MEMS-based coil realized on a parylene cantilever, and a miniature NdFeB magnet, resulting in a small sized EM harvester prototype with a strong magnetic part. The magnet is attached to a moving platform, whereas the coil is fixed to a stationary base. The mechanical frequency up-conversion (mFupC) technique is utilized to increase the energy conversion efficiency. The fabricated prototype has a volume of 120 mm(3) and generates 1.44 mV RMS voltage and 24 nW RMS power from 10 Hz, 4 mm peak-to-peak (0.8 g) external vibrations. A power density of 200 nW/cm(3) has been realized with the prototype. (C) 2012 Elsevier Ltd....Selection and/or peer-review under responsibility of the Symposium Cracoviense Sp. z.o.o.