26th European Conference on Solid-State Transducers (Eurosensors), Krakow, Polonya, 9 - 12 Eylül 2012, cilt.47, ss.664-667
This paper presents a miniature and non-resonant vibration based electromagnetic (EM) energy harvester, which generates energy from low frequency and low amplitude vibrations. The structure combines a MEMS-based coil realized on a parylene cantilever, and a miniature NdFeB magnet, resulting in a small sized EM harvester prototype with a strong magnetic part. The magnet is attached to a moving platform, whereas the coil is fixed to a stationary base. The mechanical frequency up-conversion (mFupC) technique is utilized to increase the energy conversion efficiency. The fabricated prototype has a volume of 120 mm(3) and generates 1.44 mV RMS voltage and 24 nW RMS power from 10 Hz, 4 mm peak-to-peak (0.8 g) external vibrations. A power density of 200 nW/cm(3) has been realized with the prototype. (C) 2012 Elsevier Ltd....Selection and/or peer-review under responsibility of the Symposium Cracoviense Sp. z.o.o.