A single mass two-axis capacitive MEMS accelerometer with force rebalance

Köse T., Terzioʇlu Y., Azgln K., Akln T.

2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015, Hawaii, United States Of America, 23 - 26 March 2015, (Full Text)

• Publication Type: Conference Paper / Full Text
• Doi Number: 10.1109/isiss.2015.7102371
• City: Hawaii
• Country: United States Of America
• Keywords: MEMS accelerometer, force rebalance
• Middle East Technical University Affiliated: Yes