A single mass two-axis capacitive MEMS accelerometer with force rebalance


Köse T., Terzioʇlu Y., Azgln K. , Akln T.

2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015, Hawaii, Amerika Birleşik Devletleri, 23 - 26 Mart 2015 identifier identifier