Optimization Of Open-Tube Furnace Diffusion With Bbr3 Liquid Source For Industrial P-Type Boron Doping Process


ORHAN e., KÖKBUDAK g., SEMİZ E., ES F., TURAN R.

PVCON2018, Ankara, Turkey, 4 - 06 July 2018

  • Publication Type: Conference Paper / Summary Text
  • City: Ankara
  • Country: Turkey
  • Middle East Technical University Affiliated: Yes