Micropatterned lead zirconium titanate thin films

Vartuli J., Ozenbas M., Chun C., Trau M., Aksay I.

JOURNAL OF MATERIALS RESEARCH, vol.18, no.5, pp.1259-1265, 2003 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 18 Issue: 5
  • Publication Date: 2003
  • Doi Number: 10.1557/jmr.2003.0173
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.1259-1265
  • Middle East Technical University Affiliated: Yes


Micropatterning of Pb(Zr0.52Ti0.48)O-3 (PZT) thin films with line features as small as 350 nm was demonstrated through capillary molding of organometallic solutions within the continuous channels of an elastomeric mold. Despite the large stresses that develop during the evaporation of the solvent, pyrolysis of the organics, and the densification and crystallization of the inorganic gel, the patterned crystalline PZT films were crack-free and mechanically robust. Flawless regions as large as I cm(2) were obtained. The cross-sectional shape of the patterned PZT lines was trapezoidlike. Single perovskite PZT grains that formed during annealing at 600-700 degreesC completely filled the cross-sectional area of the patterned lines. Lead acetate, zirconium propoxide, and titanium isopropoxide were used as the starting materials. Substrates used included silver tape, stainless steel plate, silicon wafer, and platinum-coated silicon wafer.