An investigation was carried out into Pd-Ag separation membranes to check whether a reduction in their Pd content was possible through the incorporation of a third element, namely Ti. For this purpose a combinatorial thin film deposition system was developed incorporating three sputter targets arranged in triangular form. The system had a substrate in the form of a magazine, 6 inch in diameter, accommodating 21 discs arranged again in triangular form aligned with the targets underneath. With this geometry, a library of thin film membranes was obtained in a single experiment covering a wide compositional field, Pd content up to of approx. 75%. The thin film library was then screened with respect their tendency to react with hydrogen. This was accomplished by the resistivity measurements carried out on the membranes, while they are subjected to heating-cooling cycle under hydrogen, the values being compared with identical cycle carried out under argon. Since permeability is a product of hydrogen solubility and diffusivity, membranes that react with hydrogen, i.e. either forming a solid solution or a hydride, delineate compositions which are candidates for separation membranes. In the present work, this procedure was applied to a portion of Ag-Ti Pd ternary system aiming for separation membranes with f.c.c. crystal structure. Mapping based on the resistivity measurement indicated, Ag35Ti22Pd43, Ag13Ti25Pd62 and their near compositions as possible candidates for separation membranes. Copyright (c) 2014, Hydrogen Energy Publications, LLC. Published by Elsevier Ltd. All rights reserved.