Research Information System
KONYA JOURNAL OF ENGINEERING SCIENCES, vol.13, no.1, 2025 (ESCI)
Amorphous thin films of ZnO-In2O3-SnO2 (a-ZITO) were manufactured using magnetron sputtering technique for the applications of thin film transparent heaters (TFTHs). For this purpose, a custom-made 3" sputtering target was prepared with a specific composition in terms of the atomic percentages (at.%) of Zn, In, and Sn cations. The impact of varying substrate temperatures on the characteristics of the samples investigated by depositing the films on glass substrates maintained at room temperature, 150 degrees C, and 250 degrees C. To improve the optical and electrical properties, post-growth annealing was carried out under forming gas atmosphere at 400 degrees C. Structural, morphological, optical, and electrical properties of the samples were thoroughly examined. Electrothermal characterization was performed on samples at room temperature and-40 degrees C to evaluate response time, saturation temperature, thermal homogeneity, stability, recyclability, thermal resistance, and the defogging/deicing capability of the produced TFTHs. The films produced at 150 degrees C demonstrated an exceptional electrothermal response, with the thermal resistance calculated to be 181.7 degrees C