An Automatically Mode-Matched MEMS Gyroscope With Wide and Tunable Bandwidth

Sonmezoglu S., Alper S. E., Akın T.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol.23, pp.284-297, 2014 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 23
  • Publication Date: 2014
  • Doi Number: 10.1109/jmems.2014.2299234
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.284-297
  • Keywords: MEMS gyroscope, gyroscope, mode-matching, closed-loop control, force-feedback
  • Middle East Technical University Affiliated: Yes


This paper presents the architecture and experimental verification of the automatic mode-matching system that uses the phase relationship between the residual quadrature and drive signals in a gyroscope to achieve and maintain matched resonance mode frequencies. The system also allows adjusting the system bandwidth with the aid of the proportional-integral controller parameters of the sense-mode force-feedback controller, independently from the mechanical sensor bandwidth. This paper experimentally examines the bias instability and angle random walk (ARW) performances of the fully decoupled MEMS gyroscopes under mismatched (similar to 100 Hz) and mode-matched conditions. In matched-mode operation, the system achieves mode matching with an error <10-ppm/Hz frequency separation between the drive and sense modes in this paper. In addition, it has been experimentally demonstrated that the bias instability and ARW performances of the studied MEMS gyroscope are improved up to 2.9 and 1.8 times, respectively, with the adjustable and already wide system bandwidth of 50 Hz under the mode-matched condition. Mode matching allows achieving an exceptional bias instability and ARW performances of 0.54 degrees/hr and 0.025 degrees/root hr, respectively. Furthermore, the drive and sense modes of the gyroscope show a different temperature coefficient of frequency (TCF) measured to be -14.1 ppm/degrees C and -23.2 ppm/degrees C, respectively, in a temperature range from 0 degrees C to 100 degrees C. Finally, the experimental data indicate and verify that the proposed system automatically maintains the frequency matching condition over a wide temperature range, even if TCF values of the drive and sense modes are quite different. [2013-0183]