A second harmonic based resonance characterization method for MEMS electrostatic resonators

Aydin E. , GOKCE F., Kangul M. , ZORLU O., KÜLAH H.

SENSORS AND ACTUATORS A-PHYSICAL, vol.274, pp.220-230, 2018 (Journal Indexed in SCI) identifier identifier

  • Publication Type: Article / Article
  • Volume: 274
  • Publication Date: 2018
  • Doi Number: 10.1016/j.sna.2018.03.013
  • Page Numbers: pp.220-230
  • Keywords: MEMS, Resonator, Resonance characterization, Feedthrough current elimination, Quality-factor enhancement, LIQUID, FORCE, CELLS


This paper presents a novel read-out approach both for eliminating parasitic feedthrough current and for enhancing the quality-factor (Q) of the resonating system at the same time. A new resonance characterization method based on sensing second harmonic component of the resonators was developed. Utilizing this method, the feedthrough current was eliminated and the signal-to-background ratio was increased from 0.9 dB to 35.5 dB. Furthermore, the Q of the resonating system was improved by 65% experimentally. It was shown that this method is suitable for eliminating both capacitive and resistive feedthrough current without using complex MEMS designs and interface electronics. (C) 2018 Elsevier B.V. All rights reserved.