A second harmonic based resonance characterization method for MEMS electrostatic resonators

Aydin E. , GOKCE F., Kangul M. , ZORLU O., KÜLAH H.

SENSORS AND ACTUATORS A-PHYSICAL, cilt.274, ss.220-230, 2018 (SCI İndekslerine Giren Dergi) identifier identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 274
  • Basım Tarihi: 2018
  • Doi Numarası: 10.1016/j.sna.2018.03.013
  • Sayfa Sayıları: ss.220-230


This paper presents a novel read-out approach both for eliminating parasitic feedthrough current and for enhancing the quality-factor (Q) of the resonating system at the same time. A new resonance characterization method based on sensing second harmonic component of the resonators was developed. Utilizing this method, the feedthrough current was eliminated and the signal-to-background ratio was increased from 0.9 dB to 35.5 dB. Furthermore, the Q of the resonating system was improved by 65% experimentally. It was shown that this method is suitable for eliminating both capacitive and resistive feedthrough current without using complex MEMS designs and interface electronics. (C) 2018 Elsevier B.V. All rights reserved.