Precision readout circuits for capacitive microaccelerometers

Yazdi N., Kulah H., Najafi K.

IEEE Sensors 2004 Conference, Vienna, Avusturya, 24 - 27 Ekim 2004, ss.28-31, (Tam Metin Bildiri)

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Cilt numarası:
  • Doi Numarası: 10.1109/icsens.2004.1426091
  • Basıldığı Şehir: Vienna
  • Basıldığı Ülke: Avusturya
  • Sayfa Sayıları: ss.28-31
  • Anahtar Kelimeler: capacitive sensor readout circuit, MEMS accelerometer, interface, micro-g accelerometer, INTERFACE, CHIP
  • Orta Doğu Teknik Üniversitesi Adresli: Evet

Özet

This paper presents a review of capacitive readout front-end circuits for high-precision accelerometers. The primary design parameters and the trade-offs affecting the resolution are presented. The discussions apply to all capacitive microsensor interfaces. Also a high-sensitivity capacitive accelerometer interface circuit for hybrid-integration with a surface/bulk micromachined micro-g accelerometer is described [7, 10]. The first generation of the circuit resolves 75aF of capacitance on similar to 120pF parasitic capacitance with a 200kHz sampling rate, and the second generation resolves 20aF with 1MHz sampling rate. The overall sensor-circuit module has a noise floor of 1.6 mu g/root HZ at ambient atmosphere.