Metal to metal and capacitive contact RF MEMS shunt switch structures

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ATASOY H. İ., TOPALLI K., ÜNLÜ M., İSTANBULLUOĞLU İ., TEMOÇİN E. U., BAYRAKTAR Ö., ...More

7th Workshop on MEMS for MilimeterWave Communications (MEMSWAVE), 27 - 30 June 2006, pp.154-156, (Full Text)

• Publication Type: Conference Paper / Full Text
• Page Numbers: pp.154-156
• Middle East Technical University Affiliated: Yes