Metal to metal and capacitive contact RF MEMS shunt switch structures


ATASOY H. İ. , TOPALLI K., ÜNLÜ M., İSTANBULLUOĞLU İ., TEMOÇİN E. U. , BAYRAKTAR Ö., ...More

7th Workshop on MEMS for MilimeterWave Communications (MEMSWAVE), 27 - 30 June 2006, pp.154-156

  • Publication Type: Conference Paper / Full Text
  • Page Numbers: pp.154-156
  • Middle East Technical University Affiliated: Yes