RF MEMS Yapilarinin Vakum Testi Için Pirani Gauge

PASİN Ö., AKIN T.

National URSI Symposium Turkey, Turkey, 6 - 08 September 2006, pp.386-388

  • Publication Type: Conference Paper / Full Text
  • Country: Turkey
  • Page Numbers: pp.386-388
  • Middle East Technical University Affiliated: Yes