A New Micro fabrication Process Simulator for Micro Electro Mechanical Systems | AVESİS

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A New Micro fabrication Process Simulator for Micro Electro Mechanical Systems

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YILDIRIM A., DÖLEN M.

ULUSLARARASI MAKİNA TASARIMI VE İMALATI KONGRESİ (UMTİK), İstanbul, Turkey, 3 - 05 September 2008, vol.2, pp.1043-1062

Publication Type: Conference Paper / Full Text
Volume: 2
City: İstanbul
Country: Turkey
Page Numbers: pp.1043-1062
Middle East Technical University Affiliated: Yes