A New Micro fabrication Process Simulator for Micro Electro Mechanical Systems


YILDIRIM A., DÖLEN M.

ULUSLARARASI MAKİNA TASARIMI VE İMALATI KONGRESİ (UMTİK), İstanbul, Turkey, 3 - 05 September 2008, vol.2, pp.1043-1062

  • Publication Type: Conference Paper / Full Text
  • Volume: 2
  • City: İstanbul
  • Country: Turkey
  • Page Numbers: pp.1043-1062