Metal mesh filters based on Ti, ITO and Cu thin films for terahertz waves

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Demirhan Y., Alaboz H., ÖZYÜZER L., Nebioglu M. A., Takan T., ALTAN H., ...More

OPTICAL AND QUANTUM ELECTRONICS, vol.48, no.2, 2016 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 48 Issue: 2
  • Publication Date: 2016
  • Doi Number: 10.1007/s11082-016-0427-z
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Keywords: Terahertz radiation, Metal mesh filters, Frequency selective surfaces, Bandpass filters, Thin film fabrication, EXTRAORDINARY OPTICAL-TRANSMISSION, BANDPASS-FILTERS, EMISSION
  • Middle East Technical University Affiliated: Yes


In this study, we have investigated the spectral performance of resonant terahertz (THz) bandpass filters which were produced from thin films with a metal-mesh shape. The aforementioned filters were fabricated from titanium, copper and indium tin oxide thin films on fused silica substrates by UV lithography with an array of cross-shaped apertures. Since the mesh period, cross-arm length and its width specify the spectral characteristics of the filters, we were able to reveal the performance of these filters experimentally using both a THz time domain spectrometer and a Fourier transform infrared spectrometer. A commercial electromagnetic simulation software, CST microwave studio, was used to verify the experimental data. The transmission of the filters are in the range 20-55 % at their relevant center frequencies. To our knowledge this study is the first to show that fabricated patterns based on ITO thin films can be used to filter THz radiation.