Proceedings of the 8th Conference and Exhibition of the European Ceramic Society, İstanbul, Turkey, 29 June - 03 July 2003, pp.1217-1220
The present work describes the preparation of Pb(Zr0.52Ti 0.48)O3 thin films by chemical solution deposition. Lead acetate, zirconium propoxide and titanium isopropoxide were used as starting materials. Substrates used were stainless steel foils of 0.025 mm thick (AISI 304). The preparation of stock solution and heat treatment procedure was described. Crack-free films were obtained by multilayer coating in which the viscosity of the solution was adjusted such that each layer was approximately 0.2 μm thick. X-ray diffraction (XRD) and scanning electron microscopy (SEM) investigations of the PZT thin films relative to the growth conditions were presented. Optimum heat treatment conditions were determined as 600°C and 3 hours to obtain high crystallinity and chemical homogeneity.