A high performance automatic mode-matched MEMS gyroscope with an improved thermal stability of the scale factor


Sonmezoglu S., Alper S., AKIN T.

2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, Barcelona, Spain, 16 - 20 June 2013, pp.2519-2522 identifier