A high performance automatic mode-matched MEMS gyroscope with an improved thermal stability of the scale factor

Sonmezoglu S., Alper S., AKIN T.

2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, Barcelona, Spain, 16 - 20 June 2013, pp.2519-2522 identifier

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/transducers.2013.6627318
  • City: Barcelona
  • Country: Spain
  • Page Numbers: pp.2519-2522
  • Middle East Technical University Affiliated: Yes