Integrated Temperature Sensor for Temperature Compensation of Inertial Sensors

KAYA O., Kose T., AZGIN K.

6th IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Naples, Italy, 1 - 05 April 2019 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Volume:
  • Doi Number: 10.1109/isiss.2019.8739559
  • City: Naples
  • Country: Italy
  • Keywords: Temperature Compensation, DETF, MEMS Resonator, Time Base
  • Middle East Technical University Affiliated: Yes


This study reports a novel dual-resonator integrated temperature sensor for temperature compensation on inertial sensors. The proposed temperature sensor eliminates the need of a TCXO or OCXO time base for accurate frequency-based temperature determination. Moreover, the sensor structure eliminates the effects of aging related shifts of the nominal frequency of counter reference. In addition, it is capable of short-term error mitigation, improving bias stability of MEMS based inertial sensors.