Integrated Temperature Sensor for Temperature Compensation of Inertial Sensors

KAYA O., Kose T., AZGIN K.

6th IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Naples, İtalya, 1 - 05 Nisan 2019 identifier identifier

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Cilt numarası:
  • Doi Numarası: 10.1109/isiss.2019.8739559
  • Basıldığı Şehir: Naples
  • Basıldığı Ülke: İtalya
  • Anahtar Kelimeler: Temperature Compensation, DETF, MEMS Resonator, Time Base
  • Orta Doğu Teknik Üniversitesi Adresli: Evet

Özet

This study reports a novel dual-resonator integrated temperature sensor for temperature compensation on inertial sensors. The proposed temperature sensor eliminates the need of a TCXO or OCXO time base for accurate frequency-based temperature determination. Moreover, the sensor structure eliminates the effects of aging related shifts of the nominal frequency of counter reference. In addition, it is capable of short-term error mitigation, improving bias stability of MEMS based inertial sensors.