Integrated Temperature Sensor for Temperature Compensation of Inertial Sensors
6th IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Naples, İtalya, 1 - 05 Nisan 2019, (Tam Metin Bildiri)
- Yayın Türü: Bildiri / Tam Metin Bildiri
- Cilt numarası:
- Doi Numarası: 10.1109/isiss.2019.8739559
- Basıldığı Şehir: Naples
- Basıldığı Ülke: İtalya
- Anahtar Kelimeler: Temperature Compensation, DETF, MEMS Resonator, Time Base
- Orta Doğu Teknik Üniversitesi Adresli: Evet
Özet
This study reports a novel dual-resonator integrated temperature sensor for temperature compensation on inertial sensors. The proposed temperature sensor eliminates the need of a TCXO or OCXO time base for accurate frequency-based temperature determination. Moreover, the sensor structure eliminates the effects of aging related shifts of the nominal frequency of counter reference. In addition, it is capable of short-term error mitigation, improving bias stability of MEMS based inertial sensors.