Integrated Temperature Sensor for Temperature Compensation of Inertial Sensors

KAYA O. , Kose T., AZGIN K.

6th IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Naples, İtalya, 1 - 05 Nisan 2019 identifier identifier


This study reports a novel dual-resonator integrated temperature sensor for temperature compensation on inertial sensors. The proposed temperature sensor eliminates the need of a TCXO or OCXO time base for accurate frequency-based temperature determination. Moreover, the sensor structure eliminates the effects of aging related shifts of the nominal frequency of counter reference. In addition, it is capable of short-term error mitigation, improving bias stability of MEMS based inertial sensors.