A MEMS BASED GRAVIMETRIC RESONATOR FOR MASS SENSING APPLICATIONS


Bayraktar E., Eroglu D., Ciftlik A. T. , KÜLAH H.

24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Cancun, Mexico, 23 - 27 January 2011, pp.817-820 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • City: Cancun
  • Country: Mexico
  • Page Numbers: pp.817-820
  • Middle East Technical University Affiliated: Yes

Abstract

This paper presents the design and implementation of a resonator-type high-resolution gravimetric sensor, which allows detection in liquid media without severe degradation of the quality factor and the resolution. The proposed system eliminates the drawbacks of traditional cantilever-based detectors by lateral motion of the mechanical structure, which significantly decreases squeeze-film damping. It has been experimentally verified that the system is capable of achieving 5.91 fg/Hz mass sensitivity by measuring the mass of a single 3 mu m diameter polystyrene bead bound on the proof mass surface.