Nanosecond Laser-Induced Micro-Modifications in Bulk of Crystal Silicon

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Kadan V., Pavlova S., Bek A., Aydin Y., Blonskyi I., Pavlov I.

2023 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2023, Munich, Germany, 26 - 30 June 2023, (Full Text)

• Publication Type: Conference Paper / Full Text
• Doi Number: 10.1109/cleo/europe-eqec57999.2023.10231359
• City: Munich
• Country: Germany
• Middle East Technical University Affiliated: Yes

Abstract

3D modifications of crystalline Si (c-Si) by nano-, pico-, or femtosecond lasers at 1550 nm-wavelength are under intensive studies nowadays due to the wide range of potential applications in photonics and optoelectronics [1]. Despite numerous amount of publications, the dependency of the modified region properties on processing laser parameters is still not completely clarified. Here we present an experimental study of local micro-modification produced by 1550 nm-wavelength ns-laser pulses in the bulk c-Si for a wide range of energies, durations, repetition rates, and writing speeds.