Mikro Elektro Mekanik Sistemler MEMS ve Silisyum Mikroisleme Teknikleri
Elektrik-Elektronik-Bilgisayar Muhendisligi 7. Ulusal Kongresi, Turkey, 31 August - 06 September 1997, (Full Text)
- Publication Type: Conference Paper / Full Text
- Country: Turkey
- Middle East Technical University Affiliated: Yes