Ba1-xSrxTiO3 films prepared by chemical solution deposition


Ozenbas M., Ozguven N., Emre M., Demirbas M.

EURO CERAMICS VIII, PTS 1-3, ss.1249-1252, 2004 (SCI İndekslerine Giren Dergi) identifier

  • Basım Tarihi: 2004
  • Dergi Adı: EURO CERAMICS VIII, PTS 1-3
  • Sayfa Sayıları: ss.1249-1252

Özet

The present work describes the preparation and the physical properties of Ba1-xSrxTiO3 (x is between 0.2 and 0.4) films by chemical solution deposition. High-quality films with uniform composition and thickness were successfully produced by spin-coating. The layers have been deposited on top of Pt/Ti/SiO2/Si substrates using barium and strontium acetates, dissolved in acetic acid, mixed up with titanium tetra-isopropoxide in isopropanol. The amounts of each constituent have been carefully adjusted to obtain stable and homogeneous sols. Different thermal treatments of the deposited layers have been carried out. They consist of a pre-firing cycle (330degreesC or 550degreesC) followed by annealing at 800degreesC for 3 hours. The heat treatment conditions for the decomposition of residual organics in the films were determined on the basis of thermal analyses of the bulk gels. XRD analyses showed that films of 1-2.5 mum thickness were polycrystalline with no preferred crystallographic orientation. The metal-BST-metal structure of the films displayed good dielectric properties. The capacitance-frequency curve reveals that the dielectric constant can reach a value of 900 at 1 kHz.