Titanium dioxide (TiO(2)) thin films, with and without silver (Ag), were prepared on float glass via sol-gel processing. The float glass substrates were pre-coated with a silica-barrier layer prior to the deposition of TiO(2)-based thin films. Silver nanoparticle incorporation into the TiO(2) matrix was achieved by thermal reduction of Ag ions dissolved in a titanium-n-butoxide (Ti[O(CH(2))(3)CH(3)](4)) based sol during calcination in air at 250, 450 and 650 A degrees C. Thin films were characterized using glancing incidence X-ray diffraction, UV-visible spectroscopy, X-ray photoelectron spectroscopy, and Raman spectroscopy. The effects of Ag concentration and calcination temperature on microstructure and on chemical and physical properties of the thin films have been reported. The size and chemical state of Ag particles, as well as the phase characteristics of the titania matrix were strongly influenced by Ag concentration and calcination temperature. Results from this study can be utilized in both processing and structure-functional property optimization of sol-gel based Ag-TiO(2) thin films by aqueous routes.