Mathematical modeling of response dynamics of n-type SnO2-based thick film gas sensor


ATMAN B., KARAKAŞ G., ULUDAĞ Y.

Materials Science in Semiconductor Processing, cilt.190, 2025 (SCI-Expanded, Scopus) identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 190
  • Basım Tarihi: 2025
  • Doi Numarası: 10.1016/j.mssp.2025.109360
  • Dergi Adı: Materials Science in Semiconductor Processing
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus, Academic Search Premier, PASCAL, Applied Science & Technology Source, Chemical Abstracts Core, Chimica, Communication Abstracts, Compendex, Computer & Applied Sciences, INSPEC, Metadex
  • Anahtar Kelimeler: CO, Ionized oxygen, Modeling, Semiconductor gas sensor, Tin oxide
  • Orta Doğu Teknik Üniversitesi Adresli: Evet

Özet

The sensing mechanism of semiconductor metal oxide (SMOX) gas sensors has a complex nature due to the physical and chemical phenomena involved. In this study, a comprehensive transient mathematical model was developed considering mass transfer, detailed surface reactions, electron transfer, and DC electric current flow between electrodes. The model was tested for the response of n-type SnO2 thick film sensors to CO gas in a dry-air environment. The results provide critical insights into the effects of crucial parameters like operating temperature, film thickness, and pore size on the two main competing mechanisms: the relative rates of surface reduction/oxidation and the rates of diffusion and surface reaction of CO. The simulation results were compared with the experimental response profiles of 7 μm thick SnO2 film for three different step pulses of magnitudes of 400 ppm, 800 ppm, and 1500 ppm CO concentrations under a continuous flow of dry air at T = 528K.