An Alternative In-situ Fluorination Source for Atomic Layer Deposition

Tunçkanat M., Demirdoğan Ö., İmer M. B.

NANOTR-16, 16th Nanoscience and Nanotechnology Conference, Ankara, Turkey, 5 - 08 September 2022, (Summary Text)

  • Publication Type: Conference Paper / Summary Text
  • City: Ankara
  • Country: Turkey
  • Middle East Technical University Affiliated: Yes