An Alternative In-situ Fluorination Source for Atomic Layer Deposition

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TUNÇKANAT M., DEMİRDOĞAN Ö., İMER M. B.

NANOTR-16, 16th Nanoscience and Nanotechnology Conference, Ankara, Turkey, 5 - 08 September 2022

• Publication Type: Conference Paper / Summary Text
• City: Ankara
• Country: Turkey
• Middle East Technical University Affiliated: Yes