Resist Free Zeolite Patterning with Electron Beam Lithography Zeo Lithography

KİRDECİLER S. K., ÖZTÜRK S., AKATA KURÇ B.

18th Internatıonal Zeolite Conference, 19 - 24 June 2016

  • Publication Type: Conference Paper / Summary Text
  • Middle East Technical University Affiliated: Yes