Characterization and performance estimation of a MEMS spirometer

Habibiabad S., SERİNAĞAOĞLU DOĞRUSÖZ Y., Beyaz M. I.

30th Eurosensors Conference, Budapest, Hungary, 4 - 07 September 2016, vol.168, pp.1020-1023 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Volume: 168
  • Doi Number: 10.1016/j.proeng.2016.11.330
  • City: Budapest
  • Country: Hungary
  • Page Numbers: pp.1020-1023
  • Keywords: MEMS spirometer, flow sensor, stator
  • Middle East Technical University Affiliated: Yes


The electrical characteristics and performance estimation of a MEMS spirometer is reported. The device design incorporates a silicon turbine, integrated magnets, ball bearings, and stators having planar coils. Pneumatic actuation of the turbine with tangential gas flow induces voltages on the stators. Spirometer parameters including breathing flow rate and lung capacity can be determined from the induced voltage amplitude and frequency. Two 12-pole stators with 25- and 50-turns per pole were fabricated. The resistance and inductance values were measured to be 3.9 k Omega and 2.6 mH, and 15.8 k Omega and 10.3 mH, respectively. The expected sensitivity of the devices was calculated to be 0.1 V/lpm and 0.2 V/lpm for the 25- and 50-turns per pole stators, respectively. The integration of all device components will lead to a compact and low-cost spirometer for patient self-monitoring. (C) 2016 The Authors. Published by Elsevier Ltd. This is an open access article under the CC BY-NC-ND license.