A New Micro fabrication Process Simulator for MEMS Designs


YILDIRIM A., DÖLEN M.

International Journal of Design Engineering, vol.1, no.4, pp.360-379, 2008 (Refereed Journals of Other Institutions)

  • Publication Type: Article / Article
  • Volume: 1 Issue: 4
  • Publication Date: 2008
  • Doi Number: 10.1504/ijde.2008.024787
  • Title of Journal : International Journal of Design Engineering
  • Page Numbers: pp.360-379