A New Micro fabrication Process Simulator for MEMS Designs
International Journal of Design Engineering, vol.1, no.4, pp.360-379, 2008 (Peer-Reviewed Journal)
- Publication Type: Article / Article
- Volume: 1 Issue: 4
- Publication Date: 2008
- Doi Number: 10.1504/ijde.2008.024787
- Journal Name: International Journal of Design Engineering
- Journal Indexes: Other Indexes
- Page Numbers: pp.360-379
- Middle East Technical University Affiliated: Yes