A New Micro fabrication Process Simulator for MEMS Designs

YILDIRIM A., DÖLEN M.

International Journal of Design Engineering, vol.1, no.4, pp.360-379, 2008 (Peer-Reviewed Journal)

• Publication Type: Article / Article
• Volume: 1 Issue: 4
• Publication Date: 2008
• Doi Number: 10.1504/ijde.2008.024787
• Journal Name: International Journal of Design Engineering
• Journal Indexes: Other Indexes
• Page Numbers: pp.360-379
• Middle East Technical University Affiliated: Yes